Radial Line Slot Antenna Plasma
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The microwave power in the radial line slot antenna source was 3000 W and the flow rate of arsine was 0.7 sccm diluted in 999.3 sccm he- lium with a process pressure of 150 mTorr. SIMS measured profiles for blanket wafer (fin top) doping are presented in Fig. 1 for both pre- and post-anneal conditions.
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- A novel feeding structure using a TE 11 (transverse electric) rotating mode in a radial line slot antenna for plasma production is proposed. Moreover, novel slot patterns with different coupling slot distributions are fabricated and tested. Extremely uniform plasma over a large diameter is observed and the possibility of control of the plasma distribution in the radial direction by changing to.
Large-area plasma excitation in densely arrayed radial line slot antennas using TE11 rotating mode
Abstract
A novel feeding structure using a TE11 (transverse electric) rotating mode in a radial line slot antenna for plasma production is proposed. Moreover, novel slot patterns with different coupling slot distributions are fabricated and tested. Extremely uniform plasma over a large diameter is observed and the possibility of control of the plasma distribution in the radial direction by changing to different coupling slot distributions is verified.
Radial Line Slot Antenna Plasma Tv
- Publication:
- Pub Date:
- June 2004
- DOI:
- 10.1139/p04-019
- Bibcode:
- 2004CaJPh..82..489Y
Simulations of the Plasma Structure of a Radial Line Slotted Antenna Plasma Source
Abstract
The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature. This property renders the source useful for soft etch applications and thin film processing for which low ion energy is desirable. Another property of the diffusion zone is that the plasma density falls from the axis to the walls. Static magnetic fields at the walls of other plasma sources have been shown to impede electron losses to walls lowering their loss rate and changing the plasma profile. In this presentation, the impact of different magnetic field configurations on the diffusion zone plasma structure will be described. To do this, an ambipolar-electromagnetic field model previously used to describe RLSA plasmas is modified to account for the impact of magnetic fields on transport coefficients and plasma chemistry. Resonant and other effects of magnetic field are also discussed.
Radial Line Slot Antenna Plasma Cutter
- Publication:
- Pub Date:
- October 2011
- Bibcode:
- 2011APS..GECQR1093Y